About xLight Inc.

xLight Inc. is a U.S.-based deep‑tech startup founded in 2021 and headquartered in Palo Alto, xLight Inc. logo appearing on Photonics Industry MonthlyCalifornia. The company is focused on developing advanced Free Electron Lasers (FELs) to provide high‑brightness EUV light sources for next‑generation semiconductor lithography.

xLight’s FEL platform aims to offer significantly higher EUV power per wafer compared to traditional laser-produced plasma systems, while eliminating consumables such as tin or hydrogen. This approach is designed to reduce water and power usage, lower fab operating costs, and improve scalability for semiconductor manufacturing.

The company leverages extensive national laboratory experience in accelerator physics and photonics to drive its system development roadmap, with plans to deliver a working system for commercial lithography applications in the coming years.

For more information, please visit https://www.xlight.com.


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Molly Bakewell Chamberlin
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